MEASURING THE TEMPERATURE AND DENSITY OF SECONDARY ELECTRONS IN AN ARGON ELECTRON-BEAM PLASMA

摘要

The results of temperature and density measurements of secondary electrons in a free jet of argon, activated in an electron beam plasma, carried out using a Langmuir double electrostatic probe. A cold plasmatron prototype with a primary beam energy of 1 keV is used obtain a jet of dense cold plasma with a cross size of approximately 80 mm and parameters with which silicon layers may be deposited with necessary characteristics in a forvacuum pressure range.