A 3.4 μm pixel pitch global shutter CMOS image sensor with dual in-pixel charge domain memory

摘要

In this paper, we describe a newly developed 3.4 mu m pixel pitch global shutter CMOS image sensor (CIS) with dual in-pixel charge domain memories (CDMEMs) has about 5.3 M effective pixels and achieves 19 ke(-) full well capacity, 30 ke(-)/lx.s sensitivity, 2.8 e(rms)(-) temporal noise, and -83 dB parasitic light sensitivity. In particular, we describe the sensor structure for improving the sensitivity and detail of the readout procedure. Furthermore, this image sensor realizes various readout with dual CDMEMs. For example, an alternate multiple-accumulation high dynamic range readout procedure achieves 60 fps operation and over 110 dB dynamic range in one-frame operation and is suitable in particular for moving object capturing. This front-side-illuminated CIS is fabricated in a 130 nm 1P4M with light shield CMOS process. (C) 2019 The Japan Society of Applied Physics