Polarization-controlled and single-transverse-mode vertical-cavity surface-emitting lasers with eye-shaped oxide aperture

摘要

We presented a single-transverse-mode and single-polarization vertical-cavity surface-emitting laser (VCSEL) with an eye-shaped oxide aperture, obtained by enhanced anisotropic oxidation of oxide layer. For apertures with dimensions of 2 x 4.6 and 3 x 6 mu m(2), the orthogonal polarization suppression ratio (OPSR) of the VCSEL was 22 and 19 dB, respectively. A single-mode suppression ratio (SMSR) of more than 25 dB at an output power of 0.5 mW was also achieved for the VCSEL with aperture dimension of 2 x 4.6 mu m(2). We believe that the proposed method to realize the mode and polarization control of VCSELs has great potential in future applications. (C) 2018 The Japan Society of Applied Physics