Fabrication of Optical Micro Scanner Driven by PZT Actuators

摘要

We have designed, simulated, fabricated and tested microelectromechanical system (MEMS) based one-dimensional (1D) optical micro scanners driven by piezoelectric actuators. The designed micro scanners have a micro mirror (1 mm x 1 mm) supported by rotation bars connected to hinges and piezoelectric cantilevers. Pt/Ti/PZT/Pt/Ti/SiO_2/SOI multi-layered structure was subjected to MEMS fabrication to form the micro scanners. Through the fabrication, we have obtained 3 types of scanners with 5, 10 and 20 μm-wide hinges. The resonant frequency corresponding to a torsional mode was measured to be 4100, 5563 and 6025 Hz, respectively. We also compared the optical scanning angle of the micro scanners actuated at the resonant frequency. The micro scanner with 10 μm-wide hinge actuated at 5563 Hz showed the widest scanning angle. The scanning angle reaches 25 deg at the actuation voltage of 20V.