PZT Actuated Microspeaker And Fabrication Method Thereof

摘要

A piezoelectric micro speaker and a manufacturing method thereof are provided to increase a deviation of the speaker by decreasing a thickness of a vibrating member. A piezoelectric micro speaker includes a piezoelectric element(101) and a vibrating member(102). The piezoelectric element is piezoelectric-driven, when a voltage is applied. The piezoelectric element is embedded in the vibrating member which is vibrated according to the movement of the vibrating member. The piezoelectric element includes a piezoelectric material and upper and lower electrodes. The piezoelectric material is formed in a thin film shape. The upper electrode is formed on the piezoelectric material, while the lower electrode is formed under the piezoelectric material. The piezoelectric material is selected from the group consisting of a ferroelectric material, PVDF(PolyVinyliDene Fluoride), and a combination thereof.