Finding Growth Regions for Carbon Nanofibers and Tubes under Different Growth Conditions Using Simplified Hot-Filament Chemical Vapor Deposition

摘要

Using only a simplified hot-filament chemical vapor deposition (SHFCVD) that has been improved and modified by drawing upon Matsumoto's hot-filament chemical vapor deposition (HFCVD) technique, the growth regions of carbonaceous product, such as carbon nanofibers or nanotubes and simple carbon films were examined consistently using of identical catalysts and carbon sources under different growth conditions. Ethanol (C_2H_5OH) and Ni metal were chosen and used as the carbon source and catalyst, respectively. This was considered to be the first examination, although other growth methods to synthesize carbonaceous products exist. Experimental results showed that the products could possibly be used to cover all grown regions by only changing substrate temperature (reaction temperature) and flow rate of hydrogen gas for bubbling in a carbon source. A comparison with products obtained using other equipment was performed.