Sensing Property of Self-Sensitive Piezoelectric Microcantilever Utilizing Pb(Zr_(0.52)/Ti_(0.48))O_3 Thin Film and LaNiO_3 Oxide Electrode

摘要

In the present study, we describe the influence of LaNiO_3 (LNO) oxide electrodes on the sensing property of self-sensitive piezoelectric microcantilevers using Pb(Zr_(0.52)/Ti_(0.48))O_3 (PZT) thin films as a sensor and an actuator. Microcantilevers with and without LNO thin films were fabricated through microelectromchanical systems (MEMS) microfabrication process. The transverse piezoelectric constant d_(31) of the PZT thin films with LNO thin films was determined to be -120 pm/V, while those without LNO thin films was determined to be -80 pm/V. In spite of the higher piezoelectric constant, the sensor output of the self-sensitive cantilevers with LNO thin films is only about 1 /5 of those without LNO thin films. The result will be discussed in relation to the dielectric loss of the PZT thin films.