Characterization of Ion Energy Distribution in Inductively Coupled Argon Plasmas Sustained with Multiple Internal-Antenna Units

摘要

We have characterized the ion energy distribution in argon plasmas sustained by multiple internal antenna units as a function of Ar pressure. The distribution has been measured using an ion energy analyzer with a mass separator. The peak of ion energy distribution depended more strongly on pressure and corresponded to the magnitude of plasma potential. The full width at half maximum of the distributions decreased with decreasing antenna RF voltage caused by a decrease in Ar pressure.