Fabrication And Electrical Characteristics Of Metal-ferroelectric-semiconductor Field Effect Transistor Based On Poly(vinylidene Fluoride)

摘要

We fabricated the metal-ferroelectric-semiconductor field effect transistor (MFSFET) using poly(vinylidene fluoride) (PVDF) thin film as a ferroelectric layer. PVDF thin films were prepared by spin-coating PVDF solutions of 2-6 wt% on Si(100) wafers with source and drain diffusion regions. The drain current-gate voltage (I_D-V_G) characteristics of MFSFET exhibited ferroelectric hysteretic curves inducing a counterclockwise loop similar to that of other ferroelectric materials. It seems that the deposited PVDF films were crystallized with the ferroelectric β phase. The memory window widths of the MFSFET were more than 1.0 V. The drain current-drain voltage (I_D-V_D) characteristics show that the MFSFET operates with the PVDF thin film used as a gate dielectric material. The MFSFET using PVDF as ferroelectric layer has promising potential for use in low-voltage operable one-transistor (1T)-type ferroelectric, random access memories (FeRAMs) using organic material.