Estimation of Cavitation Sensor with Hydrothermally Synthesized Lead Zirconate Titanate Film on Titanium Cylindrical Pipe: Spatial Distribution of Acoustic Cavitation Field and Basic Characteristics of Cavitation Sensor

摘要

We developed a small cavitation sensor by the deposition of a hydrothermally synthesized lead zirconate titanate (PZT) polycrystalline film on a Ti hollow cylindrical pipe. The spatial distributions of acoustic cavitation generated in a vessel of 150 kHz sonoreactor were measured by using our cavitation sensor. We estimated the spatial distribution of acoustic cavitation by using the broad band integrated voltage (BIV) calculated from the output signal of our cavitation sensor. A similar spatial distribution of the BIV to a sonochemical luminescence pattern could be observed in the measured results. Our fabricated cavitation sensor could be applied to the measurement of sound pressure in a high-intensity ultrasound field with acoustic cavitation for a period longer than 150 without damage. We measured the spatial distribution and directivity of the receiving sensitivity for the characterization of our cavitation sensor. It is suggested from the measured results that the BIV and the cavitation signal included in the output signal from the cavitation sensor are based on the acoustic cavitation generated in the cylindrical hollow of our cavitation sensor.