A New Floating-Probe for Measurement of Insulated Plasma Produced by Radio-Frequency Power

摘要

The paper provides a new probe method which enables us to measure parameters of plasmas produced in insulated vessel. In particular, the measurements of electron temperature and density are all made in floating condition of probe, so that there is no need to draw net current from plasma. The method is based on measurement of the functional relationship between the floating potential and the heating voltage of emissive probe. In the first place, the measured parameters of plasma produced in the metal vessel are shown, demonstrating how a new probe works. In the second place, the measurement in the quartz discharge tube is shown, and the measured data by the present method are compared with those obtained by the conventional double probe, demonstrating that they are consistent. It is emphasized that the present new method is a first success in floating probe to be able to measure all plasma parameters.