Fabrication and leakage current and ferroelectric characteristics of multiferroic Fe_3O_4/(Bi_(3.25_Nd_(0.65)Eu_(0.10))Ti_3O_(12) composite thin films with Fe_3O_4 magnetic electrodes micropatterned by reactive ion etching

摘要

Regardless of the deposition time (30-90 min), almost single-phase magnetite (Fe3O4) films with a cubic inverse-spinel structure were produced at a substrate temperature of 500 degrees C by metalorganic chemical vapor deposition (MOCVD). The Fe3O4/(Bi(3.25)Nd(0.65)Eu(0.1)0) Ti3O12 (BNEuT) composite film deposited at 500 degrees C for 90 min by MOCVD exhibited excellent room-temperature magnetic properties, such as a saturation magnetization of 480 emu/cm(3), a residual magnetization of 160 emu/cm(3), and a coercivity of 297 Oe. Ferromagnetic Fe3O4 electrodes micropatterned using a combination of photolithography and reactive ion etching were fabricated after MOCVD, and their structural, leakage current, and ferroelectric characteristics were investigated. The room-temperature leakage current density-applied electric field and polarization-electric field (P-E) characteristics of the composite films were successfully measured using Fe3O4 electrodes. The room-temperature P-E hysteresis loop for a sample with the structure Fe3O4/BNEuT/Nb: TiO2/Ti had a relatively good shape, with a remanent polarization of 8 mu C/cm(2) and a coercive field of 193 kV/cm. (C) 2017 The Japan Society of Applied Physics