Effect of LaNiO_3 electrode on microstructural and ferroelectric properties of Bi_(3.25)Eu_(0.75)Ti_3O_(12) thin films

摘要

Bi_(3.25)Eu_(0.750Ti_3O_(12)) (BET) thin films were deposited on the LaNiO_3 (LNO (100))/Si and Pt/Ti/SiO_2/Si substrates by the metal-organic decomposition method. Structural and dielectric properties of BET thin films for the applications in nonvolatile ferroelectric random access memories were investigated. Both the microstructure and morphology of the films were analyzed by X-ray diffraction and atomic force microscope. Even at low temperature 650 ℃, the BET thin firms were deposited on LNO bottom electrode and exhibited [001] orientation. Compared with the films deposited on Pt electrode, the BET thin films on the LNO electrode annealed at 650 ℃ showed larger dielectric constants and remanent polarization. For the BET thin films on the LNO electrode annealed at 650℃, the remanent polarization 2P_r and coercive field were 45.6 μC/cm~2 and 171 kV/cm, respectively.