Thickness-dependent structure and properties of SnS2 thin films prepared by atomic layer deposition

摘要

Tin disulfide (SnS2) thin films were deposited by a thermal atomic layer deposition (ALD) method at low temperatures. The physical, chemical, and electrical characteristics of SnS2 were investigated as a function of the film thickness. SnS2 exhibited a (001) hexagonal plane peak at 14.9 degrees in the X-ray diffraction (XRD) results and an A(1g) peak at 311 cm(-1) in the Raman spectra. These results demonstrate that SnS2 thin films grown at 150 degrees C showed a crystalline phase at film thicknesses above 11.2nm. The crystallinity of the SnS2 thin films was evaluated by a transmission electron microscope (TEM). The X-ray photoelectron spectroscopy (XPS) analysis revealed that SnS2 consisted of Sn4+ and S2- valence states. Both the optical band gap and the transmittance of SnS2 decreased as the film thickness increased. The band gap of SnS2 decreased from 3.0 to 2.4 eV and the transmittance decreased from 85 to 32% at a wavelength of 400nm. In addition, the resistivity of the thin film SnS2 decreased from 1011 to 106 Omega center dot cm as the film thickness increased. (C) 2017 The Japan Society of Applied Physics.