Laser plasma vacuum ultraviolet light source using solid rare-gas targets

摘要

The laser plasma emission spectra in a broadband from 30 to 200 nm of solid Ar, Kr, and Xe targets are presented for the first time. The spectra are composed of a broadband continuum and lines. A broadband vacuum ultraviolet (VUV) spectrometer that can measure spectra in the wavelength range from 30 to 200 nm is developed and the measured spectra are able to be calibrated over the entire broad band. The spectral intensity integrated from 30 to 200 nm indicates that the VUV average power generated in the wavelength range is 30 mW when the laser energy is 1 J at 1 Hz. The number of photons of monochromatic light after passing through the spectrometer is estimated to be more than 5 x 10(6) photonsm/pulse over the wavelength range and is considered to be useful for applications of broadband VUV spectroscopy. (C) 2018 The Japan Society of Applied Physics