LASER PLASMA EXTREME ULTRAVIOLET LIGHT SOURCE AND METHOD OF GENERATING LASER PLASMA EXTREME ULTRAVIOLET LIGHT

摘要

PROBLEM TO BE SOLVED: To provide a laser plasma EUV(extreme ultra violet) light source generating larger liquid droplets relative to a plasma target material.;SOLUTION: The EUV light source 50 forcibly passes a liquid 58, preferably liquid xenon, through a nozzle 64 instead of forcibly passing gas through the nozzle. The geometrical shape of the nozzle 64 and the pressure of the liquid 58 passing through the nozzle 64 are such that the liquid 58 is sprayed to form a spray 70 of high-density droplets 72. Since the droplets 72 are formed from the liquid, the droplets are large in size and more linkely to generate EUV rays. A heat exchanger 60 is used for converting the gaseous xenon 54 to the liquid 58 before forcibly passing it through the nozzle 64.;COPYRIGHT: (C)2002,JPO