Modelling and simulation of static deflection behaviour of non-prismatic multilayer piezoelectric nanocantilevers using non-local effects with simple polynomial solutions

摘要

Static deflection analysis of Euler-Bernoulli non-prismatic multilayer piezoelectric nano electromechanical (p-NEM) cantilever beams have been studied in theoretical and simulation aspects for various profiles of p-NEM cantilevers by applying the electrical load. Eringen's non-local elasticity theory has been implemented to study the transverse piezoelectric deflection and tip displacement of p-NEM cantilevers and solution were obtained using simple polynomials. This method is applied to various profiles like the rectangular and trapezoidal shape of three different thickness (h/2, h and 2h) of piezoelectric layer. The dominance of non-local effects with electric field is also evaluated. The obtained results are compared with experimental results and it is concluded that better deflection is obtained for the trapezoidal profile with h/2 thickness of ZnO piezoelectric layer of suitable nanocantilevers for nanoscale applications. This investigation will be very useful for designing the p-NEM cantilever for biological/ chemical sensing, nanogenerators and energy harvesting applications.