Dynamic modeling and vibration analysis of piezoelectric microcantilever in AFM application

摘要

Piezoelectric microcantilevers (MCs) are widely used in common piezoelectric micro-electromechanical systems. These systems are used in ultraprecise scanning and characterization applications. Given the widespread use of this type of MCs in nanotechnology, their vibrating motion problem has recently become a matter of interest. Accurate vibration analysis and studying their vibrating behavior can play a key role in increasing their measurement accuracy and optimal design. For this purposes, first, the differential equation of motion of MCs is solved using modal superposition method by using Runge-Kutta in time domain and finite element methods. The extended Fourier amplitude sensitivity test statistical method is used to conduct sensitivity analysis on the main parameters of the vibrating motion to determine the effects of each interaction coefficient on the motion of the MC. Results showed that the numerical finite element method and modal superposition method based on the non-uniform beam model have acceptable accuracy in calculating resonance amplitude and natural frequency of this kind of MC. The results of the sensitivity analysis indicate the high sensitivity of the first vibrating mode to force coefficient, which means that this mode is suitable for topography of the sample surface and the nanoparticle.