MATHEMATICAL MODEL OF THERMAL REACTION PROCESS FOR EXTERNAL HEATING EQUIPMENT IN THE MANUFACTURE OF SEMICONDUCTORS (PART Ⅱ)

摘要

This paper proposes a mathematical model that is derived from bilinear partial differential equations (BPDs) in order to configure a control system including the external heat equipment (EHE) proposed in Part1. It is widely recognized that the mathematical model of the heat exchange unit has been reported. The target control system can be configured using the control parameter of the overall heat exchange coefficient (OHEC), which is given using a linear approximation from BPDs to an ordinary differential equation (ODE). The numerical simulation results are also represented for the optimal control system, and the gradient method is used in this simulation. Our findings show that this study is suitable for possible practical systems.