MATHEMATICAL MODEL OF THERMAL REACTION PROCESS FOR EXTERNAL HEATING EQUIPMENT IN THE MANUFACTURE OF SEMICONDUCTORS (PART Ⅰ)

摘要

This paper presents a mathematical model for a thermal reaction process of external heating equipment. The new control system design for this process, which treats a heat source flowing model for an externally attached device is proposed. The equation of a distributed parameter system as a coupled system with the heat reaction process is presented. This paper proposes a lumped heating system to replace the distributed heating function with a time delay as a whole element. The model that is equivalent to a system in order to make possible practical devices is considered. This paper discusses the configuration of the linear model using the exact linearization method for the coupled system with external heating equipment.