An improved method of network analyzer calibration is described using the 15-term full model which includes all leakage errors between on-wafer probe tips. This model is well suited to eliminate measurement errors of network analyzer measurements on the wafer. All procedures presented are so-called self-calibration methods, allowing for standards that are not completely known. This allows one to create calibration standards in an easy way and to monitor the calibration process. Simple and robust closed-form equations are presented for all procedures. All procedures can be derived from the general method MURN (match, unknown, reflect, network). The MORN (match, open, reflect, network) is presented, which is particular interesting for on-wafer-measurements. Furthermore, the TMRN (through, match, reflect, network) procedure presented is especially designed for coaxial measurement problems. Experimental results of the TMRN method attest to the very good accuracy and viability of the 15-term self-calibration procedures and can be compared with other 15-term procedures.
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