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A Comparison of Uncertainty Evaluation Methods for On-Wafer $S$-Parameter Measurements

机译:晶圆上$ S $参数测量不确定度评估方法的比较

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摘要

An experimental analysis of on-wafer $S$-parameter uncertainties is presented. Recently, two different approaches, based either on differential numerical programming or on a fully analytical solution, have been introduced. In order to establish their suitability, a careful comparison is given for on-wafer measurements. Through this comparison, possible limitations and causes of errors are also highlighted. Finally, the uncertainty evaluation of the 16-term error model is presented for the first time.
机译:进行了晶圆上S $参数不确定性的实验分析。最近,基于微分数值编程或完全解析解决方案的两种不同方法已被引入。为了确定其适用性,对晶圆上的测量进行了仔细的比较。通过此比较,还突出显示了可能的限制和错误原因。最后,首次提出了16项误差模型的不确定性评估。

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