A New Self-Calibration Method of an $LCR$ Meter for RF Resistance Calibration Using Capacitance Standards

摘要

This paper describes how to calibrate a four-terminal-pair (4TP) $LCR$ meter at the right (90$^{circ}$) angle. The $LCR$ meter uses the right angle signal to process a synchronous detector as a vector signal receiver. The right-angle calibration method uses, at a minimum, one variable-phase signal generator (SG) and a phase shift circuit. The SG does not require a precision right angle, but it does need good phase stability. The described phase shifter provides the required differential phase of nearly the right angle. As a result, the right-angle phase deviation of the $LCR$ meter is better than 65 $muhbox{rad}$ (0.223 $^{prime}$) with 37-$mu hbox{rad}$ (0.127$^{prime}$) uncertainty at 10 MHz. This method is also applicable to the phase calibration of a vector network analyzer.