High-Resolution Fourier-Transform IR Spectroscopic Determination of Impurities in Silicon Tetrafluoride and Silane Prepared from It

摘要

The impurity compositions of silicon tetrafluoride and silane prepared from it have been determined by high-resolution Fourier-transform IR spectroscopy. In the spectra of SiF_4 samples differing in purity, we have identified rovibrational bands arising from Si_2F_6O, SiF_3OH, HF, SiF_3H, SiF_2H_2, SiH_3F, CH_4, CO_2, and CO impurities. Their detection limits lie in the range 9 x 10~(-5)(CO_2) to 3 x 10~(-3) mol % (Si_2F_6O). In the spectra of SiH_4 samples of different purity, we have detected CH_4, CO_2, SiF_3H, SiF_2H_2, and SiF_4 impurities. Their detection limits lie in the range 8 x 10~(-5) (CO_2) to 1 x 10~(-3) mol % (SiF_4).