Recycling silane comprises injecting a mixture of pure silane/hydrogen in chamber, extracting the mixture, discharging a mixture comprising silane, hydrogen, silicon tetrafluoride and non-zero amount of feed gas and separating

摘要

Process of recycling silane comprises: (a) injecting a mixture of pure silane/hydrogen (SiH 4/H 2) in a reaction chamber (7) to produce thin films containing silicon; (b) extracting the mixture using a pump (8) providing a feed gas; (c) discharging a mixture comprising at least one silane, H 2, silicon tetrafluoride (SiF 4) and non-zero amount of the feed gas in the pump at a pressure close to atmospheric pressure; and (d) separating SiF 4and mixture of SiH 4/H 2/the feed gas, where at least 50%, preferably 80% of silane from the step (b) is reused after the step (d) for a further step (a).