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机译:N-三甲基硼嗪-氮混合物中通过等离子体增强化学气相沉积法生长的薄膜BC_xN_y的性质
Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, Novosibirsk, 630090 Russia;
rnNikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, Novosibirsk, 630090 Russia;
rnNikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, Novosibirsk, 630090 Russia;
rnNovosibirsk State University, ul. Pirogova 2, Novosibirsk, 630090 Russia;
rnNikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, Novosibirsk, 630090 Russia;
rnNikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, Novosibirsk, 630090 Russia;
rnNikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, Novosibirsk, 630090 Russia;
rnNikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, Novosibirsk, 630090 Russia;
rnInstitute of Semiconductor Physics, Siberian Division, Russian Academy of Sciences,pr. Akademika Lavrent'eva 13, Novosibirsk, 630090 Russia;
rnNikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, Novosibirsk, 630090 Russia;
rnNikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, Novosibirsk, 630090 Russia;
rnNikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, Novosibirsk, 630090 Russia;
rnNikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, Novosibirsk, 630090 Russia;
rnNikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, Novosibirsk, 630090 Russia;
机译:三乙胺硼烷低压化学气相沉积法生长的BC_xN_y薄膜的力学性能和密度
机译:在N_2-H_2-Ar气体混合物中通过等离子体增强的金属有机化学气相沉积法生长的薄膜上
机译:等离子体增强化学气相沉积种植的氧氮化硅膜的光学性能
机译:通过分布电子回旋谐振等离子体增强化学气相沉积在SiGe层上生长在SiGe层上生长的氮化硅膜的电性能
机译:通过等离子体增强的金属有机化学气相沉积法制得的锶钛氧化物和钡(1-x)锶钛氧化物外延薄膜。
机译:193 nm ArF受激准分子激光在激光辅助等离子体增强SiNx的化学气相沉积中的作用以进行低温薄膜封装
机译:离子轰击能量通量对自由基注入等离子体增强化学气相沉积生长的化学成分对化学成分的影响和氢化非晶碳膜的结构