SAWデバイスシミュレーションにおけるモード結合パラメータの周波数依存性検討

摘要

SAW filters are requested to have a larger ratio bandwidth as wireless communication systems provide high speed data transfer. If the frequency dependencies of the parameters are not considered, enough accuracy cannot be demonstrated by the model in which the behavior of SAW is simplified like the coupling-of-modes theory among various simulators used to design. In this paper, approximated equations that express the frequency dispersion of phase velocity and transduction coefficient are shown. It is shown that the simulations can predict measurement characteristic precisely by using that equations.%無線方式の高速化に伴い，SAWフィルタにも大きな比帯域が要求されるようになっている．設計に用いられるシミュレータには様々あるが，モード結合理論のようにSAWの振る舞いを単純化したモデルでは，そのパラメータの周波数依存性を考慮しなければ十分な精度を発揮できない．本報告では，速度分散性と電気一昔響変換係数の周波数依存性についての近似式を示し，それらを用いたシミュレーションが実測特惟を精度よく再現できることを示す．