Effective annealing for Si film

摘要

Effective annealing results for amorphous silicon film are discussed. Silicon TFTs are playing an important role for Active-Matrix Flat Panel Displays (AMFPD). Poly-Si TFTs provide a possibility to develop highly functional system on pane (SoP) applications. In order to get a high performance TFTs and thin-film solar cells, large poly-crystal grains and high activation of impurity for the film is required. Two basic crystallization techniques namely solid phase crystallization (SPC) and laser annealing (LA) are important. In order to mount a poly-Si TFTs as well as thin solar cells on panel, LA and RTA techniques are expected to be applied for the channels as well as for the contact electrodes as a low temperature poly-Si (LTPS) process.