A rod-shaped vibro touch sensor using PZT thin film

摘要

We have fabricated a probe sensor. This sensor is for highnprecision coordinate measuring machines, surface roughness measuringntools, or scanning probe microscopes (SPM). This sensor consists of anrod vibrating in the axial direction. The longitudinal vibration wasnexcited and also detected by PZT thin film. The PZT thin film wasnfabricated by a hydrothermal method. The hydrothermal method uses thenreaction process in hot and high pressure aqueous solutions. We made an27.8-mm long sensor. Its resonance frequency was 116 kHz. Thensensitivity and resolution were evaluated by experiments. We succeedednin oscillating the rod and detecting the contact