Modeling and simulation of an electronic component manufacturingsystem using hybrid Petri nets

摘要

Modelling and analysis for the design and operation ofnmanufacturing systems is a vital need. For semiconductor manufacturingnsystems, which are large scale systems, discrete Petri nets do notnconstitute an adequate tool for modeling and analysis. In fact, use ofndiscrete Petri nets is confronted with tile state explosion and the highncost of simulation. In this paper, hybrid Petri nets are presented asnpowerful tools for modeling and simulation of semiconductornmanufacturing systems. This model has been used for modeling andnsimulation of a real life electronic components manufacturing system. Itnprovides an accurate and first simulation of this system