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Characterization of radiation effects on trench-isolated bipolar analog microcircuit technology

机译:辐射对沟槽隔离双极模拟微电路技术的影响的表征

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Radiation effects on trench-isolated bipolar analog microcircuits have been characterized through measurement of neutron damage, long-term ionizing radiation damage, transient photoresponse, and pulsed radiation-induced latchup. The characterization was done to provide basic information on the hardness of the technology for potential system application. The principal means of evaluation was through characterization of process-control and custom test chips. Results of the test chip characterization were compared to radiation effects characterization of basic microcircuits of identical process technologies. The goal of the characterization was to determine if there were any surprises in the radiation susceptibility. None was found in the displacement damage, transient photoresponse, or radiation-induced latchup. Displacement damage effects are determined by transistor gain degradation. Transient photoresponse is dominated by the substrate photocurrent. The presence of deep trenches does not prevent latchup but latchup can be mitigated by the process doping profile. There were some questions remaining associated with the long-term ionization radiation damage. Test chip data were not completely consistent and some further investigation is necessary.
机译:通过测量中子损伤,长期电离辐射损伤,瞬态光响应和脉冲辐射诱发的闩锁,可以表征对沟槽隔离的双极模拟微电路的辐射效应。进行表征以提供有关潜在系统应用技术硬度的基本信息。评估的主要手段是通过表征过程控制和定制测试芯片。将测试芯片表征的结果与相同工艺技术的基本微电路的辐射效应表征进行了比较。表征的目的是确定辐射敏感性是否有任何意外。在位移损伤,瞬态光响应或辐射引起的闩锁中均未发现。位移损坏的影响取决于晶体管增益的下降。瞬态光响应主要由底物光电流决定。深沟槽的存在不能防止闭锁,但是可以通过工艺掺杂分布来减轻闭锁。长期电离辐射损伤还存在一些问题。测试芯片数据并不完全一致,需要进一步调查。

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