Simple noise deembedding technique for on-wafer shield-based test fixtures

摘要

Conventional on-wafer test fixtures have a significant impact on two-port noise-parameter measurements of silicon devices at gigahertz frequencies. This leads to increased measuring inaccuracy, as well as a need for complicated and area-consuming deembedding procedures. Alternatively, shield-based test fixtures are characterized by very few series effects and, thus, support cost-efficient and simple deembedding. The applicability of a simple one-step method is illustrated with experimental data. A performance comparison is made to full-scale deembedding methods based on conventional, as well as shield-based test fixtures.