Direct Deembedding of Noise Factors for On-Wafer Noise Measurement

摘要

This paper extends the noise theory of linear networks to enable direct deembedding of noise factors for an active device surrounded by a passive four-port. It solves the problem of noise factor deembedding, when there are feedback paths between the output and input of a device-under-test. It also leads to a new approach to obtain intrinsic noise parameters for on-wafer noise measurements by performing deembedding first and optimization last. Verification of the noise factor deembedding algorithm is performed using idealized data, and the evaluation of the new noise parameter deembedding approach is conducted using the experimental data of the n-type MOSFETs fabricated in 28- and 90-nm CMOS technology from United Microelectronics Corporation.