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-Band Total Power Radiometer Performance Optimization in an SiGe HBT Technology

机译:SiGe HBT技术的宽带总功率辐射计性能优化

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A $D$-band SiGe HBT total power radiometer is reported with a peak responsivity of 28 MV/W, a noise equivalent power (NEP) of 14–18 ${hbox{fW/Hz}}^{1/2}$, and a temperature resolution better than 0.35 K for an integration time of 3.125 ms. The $1/f$ noise corner of the radiometer is lower than 200 Hz. Fabricated in a developmental technology with 270-GHz $f_{T}$ and 330-GHz $f_{rm MAX}$, it includes a five-stage low-noise amplifier (LNA) with 4–7-GHz bandwidth and over 35 dB of gain centered at 165 GHz, along with a square-law detector with an NEP below 6 ${hbox{pW/Hz}}^{1/2}$ up to 170 GHz. An average system noise temperature of 1645 K is obtained using the $Y$-factor method and a noise bandwidth of 10 GHz calculated from the measured $S21(f)$ characteristics of the radiometer. The reduced $1/f$ noise corner frequency in the presence of the amplifier, compared to that of the detector, appears to indicate that, unlike in III–V radiometers, LNA gain fluctuations are not a problem in SiGe HBT radiometers. The circuit consumes 95 mW and occupies ${hbox {765}},times{hbox {490}}~mu{hbox {m}}^{2}$. Wafer mapping of the radiometer sensitivity and of the amplifier gain was performed across different process splits. The mapping results demonstrate that the radiometer can be employed as a r-nlatively simple and area-efficient transistor noise-measure monitor, useful in SiGe HBT vertical profile optimization.
机译:据报道,一个$ D $波段的SiGe HBT总功率辐射计的峰值响应度为28 MV / W,噪声等效功率(NEP)为14-18 $ {hbox {fW / Hz}} ^ {1/2} $ ,积分时间为3.125 ms时,温度分辨率优于0.35K。辐射计的$ 1 / f $噪声角低于200 Hz。它采用具有270 GHz $ f_ {T} $和330 GHz $ f_ {rm MAX} $的开发技术进行制造,包括一个具有4–7 GHz带宽,超过35个带宽的五级低噪声放大器(LNA)。 dB增益集中在165 GHz,并且在170 GHz时具有NEP低于6 $ {hbox {pW / Hz}} ^ {1/2} $的平方律检波器。使用$ Y $因子方法获得1645 K的平均系统噪声温度,并根据测得的辐射计的$ S21(f)$特性计算出10 GHz的噪声带宽。与检波器相比,放大器存在时降低的$ 1 / f $噪声转折频率似乎表明,与III–V辐射计不同,LNA增益波动在SiGe HBT辐射计中不是问题。该电路功耗为95 mW,占用$ {hbox {765}},乘以{hbox {490}}〜mu {hbox {m}} ^ {2} $。辐射计灵敏度和放大器增益的晶圆映射是在不同的工艺过程中进行的。映射结果表明,辐射计可以用作相对简单且面积有效的晶体管噪声测量监控器,可用于SiGe HBT垂直轮廓优化。

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