Flying height measurement metrology for ultra-low spacing in rigid magnetic recording

摘要

Flying height measurement metrology is presented for ultra-low spacing in rigid magnetic recording. The issues related to the intensity interferometric flying height measurement method are studied. This includes the flying height measurement shift induced by slider material, the dependence of slider optical constants on measurement angle of incidence and location, flying height measurement repeatability, flying height tester calibration, and the effect of the glass disk.