This paper describes a comparison with, the experimental flying heights and the simulated flying heights, which were calculated by using the linearized Boltzmann equation and the conventional modified Reynolds equations. The experiments were measured under the ambient pressure from atmospheric pressure to 6.7 × 10{sup}(-3) MPa. The calculated results of the linearized Boltzmann equation were almost the same as the experimental results from the high spacing range to the low spacing range of 10 nm. At the slider spacing of 10 nm, it was confirmed that the difference between the experimentally measured results and the calculated results of the linearized Boltzmann equation was less than 5%, and the differences in the conventional slip flow approximation equations were over 30%.
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