An Integrated Micromachined Thermopile Sensor With a Chopper Interface Circuit for Contact-Less Temperature Measurements

Elisabetta Moisello; Michele Vaiana; Maria Eloisa Castagna; Giuseppe Bruno; Piero Malcovati; Edoardo Bonizzoni

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An Integrated Micromachined Thermopile Sensor With a Chopper Interface Circuit for Contact-Less Temperature Measurements

机译：带有斩波器接口电路的集成式微机械热电堆传感器，用于无触点温度测量

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摘要

This paper presents a sensor and its readout circuit suitable for contact-less temperature measurements. The sensor, designed employing a MEMS technology provided by STMicroelectronics, consists of a miniaturized micromachined silicon thermopile with 180-

机译：本文提出了一种适合非接触式温度测量的传感器及其读出电路。该传感器采用意法半导体（STMicroelectronics）提供的MEMS技术设计，由一个微型微机械硅热电堆组成，该热电堆具有180

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《Circuits and Systems I: Regular Papers, IEEE Transactions on》 |2019年第9期|3402-3413|共12页
作者
Elisabetta Moisello; Michele Vaiana; Maria Eloisa Castagna; Giuseppe Bruno; Piero Malcovati; Edoardo Bonizzoni;
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作者单位

Department of Electrical Computer and Biomedical Engineering University of Pavia Pavia Italy;

STMicroelectronics Catania Italy;

Department of Electrical Computer and Biomedical Eng;

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原文格式 PDF
正文语种 eng
中图分类
关键词
Temperature measurement; Detectors; Temperature sensors; Choppers (circuits); Voltage measurement; Junctions;

机译：温度测量;探测器;温度传感器;斩波器（电路）;电压测量交界处;

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1. An Integrated Micromachined Thermopile Sensor With a Chopper Interface Circuit for Contact-Less Temperature Measurements [J] . Elisabetta Moisello, Michele Vaiana, Maria Eloisa Castagna, Circuits and Systems I: Regular Papers, IEEE Transactions on . 2019,第9期

机译：带有斩波器接口电路的集成式微机械热电堆传感器，用于无触点温度测量
2. Micromachined piezoresistive inclinometer with oscillator-based integrated interface circuit and temperature readout [J] . Simone Dalola, Vittorio Ferrari, Daniele Marioli Measurement Science & Technology . 2012,第3期

机译：微机械压阻测斜仪，具有基于振荡器的集成接口电路和温度读数
3. CMOS integrated sensor circuit for temperature measurement based on 50 nm technology [J] . Jihong Liu, Yingying Sun, Chengzhi Shi The Journal of Engineering . 2017,第12期

机译：基于50 nm技术的用于温度测量的CMOS集成传感器电路
4. A Chopper Interface Circuit for Thermopile-Based Thermal Sensors [C] . Elisabetta Moisello, Michele Vaiana, Maria Eloisa Castagna, IEEE International Symposium on Circuits and Systems . 2019

机译：基于热电堆的热传感器的斩波器接口电路
5. Integrated Circuit Design Techniques for High-Speed Low-Power Analog-to-Digital Converters and On-Chip Calibration of Sensor Interface Circuits [D] . Zahrai, Seyed Alireza. 2017

机译：用于高速低功耗模数转换器的集成电路设计技术和传感器接口电路的片上校准
6. An Integrated Thermopile-Based Sensor with a Chopper-Stabilized Interface Circuit for Presence Detection [O] . Elisabetta Moisello, Michele Vaiana, Maria Eloisa Castagna, 2019

机译：集成斩波稳定接口电路的基于热电堆的传感器用于状态检测
7. An Integrated Thermopile-Based Sensor with a Chopper-Stabilized Interface Circuit for Presence Detection [O] . Elisabetta Moisello, Michele Vaiana, Maria Eloisa Castagna, 2019

机译：基于集成的热电堆的传感器，具有斩波稳定接口电路，用于存在检测

An Integrated Micromachined Thermopile Sensor With a Chopper Interface Circuit for Contact-Less Temperature Measurements

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