The Use of Transparent Conducting Indium-Zinc Oxide Film as a Current Spreading Layer for Vertical-Structured High-Power GaN-Based Light-Emitting Diodes

摘要

In this study, the performance of vertical-structured high-power GaN-based light-emitting diodes (VM-LEDs) with a transparent and low-resistant indium-zinc oxide (IZO) film as a current spreading layer (CSL) was investigated. Nickel electroplating and patterned laser liftoff techniques were employed for the transfer of sapphire substrate to nickel substrate. The novel IZO CSL atop n-side-up VM-LEDs offering benefits of superior current spreading ability, larger extraction efficiency, and lower forward voltage drop was demonstrated. As compared to the regular LED without IZO CSL, the use of an IZO CSL with an optimum thickness of around 300 nm leads to an increase in light output power by 97.1 (67.8)percent and a decrease in forward voltage drop by 4.9 (15.5)percent under an injection current of 350 (800) mA.