Functionally graded Transparent conducting oxide film and method for manufacturing thereof, Anode for Organic light emitting diode and window layer for solar cell using functionally graded transparent conducting oxide film

摘要

The present invention is a transparent conductive oxide film tilt function, a positive electrode and an organic light emitting diode relates to a method of manufacturing the same, a transparent conductive oxide film of the present invention is based on zinc oxide (ZnO), gallium oxide here has a concentration gradient in the thickness direction (Ga ₂ O ₃ ) is deposited, preferably may be applied to the anode of the organic light emitting diode (OLED). According to the present invention, and the conventional material cost than that of ITO that is used as a transparent conductive oxide (TCO) is low, compared to the impurity-doped ZnO-based TCO can simplify the process. In addition, when used as an electrode OLED flat panel displays and solar cells, such as, preferably the anode of the OLED device according to the present invention, high light transmittance and low resistance, such as due to a high work function cathode and a hole transport layer ( lower the injection barrier between the hole transport layer), the efficiency and life of the device is achieved. ;