Rare-earth-doped GaN: growth, properties, and fabrication of electroluminescent devices

摘要

A review is presented of the fabrication, operation, and applications of rare-earth-doped GaN electroluminescent devices (ELDs). GaN:RE ELDs emit light due to impact excitation of the rare earth (RE) ions by hot carriers followed by radiative RE relaxation. By appropriately choosing the RE dopant, narrow linewidth emission can be obtained at selected wavelengths from the ultraviolet to the infrared. The deposition of GaN:RE layers is carried out by solid-source molecular beam epitaxy, and a plasma N2 source. Growth mechanisms and optimization of the GaN layers for RE emission are discussed based on RE concentration, growth temperature, and V/III ratio. The fabrication processes and electrical models for both dc- and ac-biased devices are discussed, along with techniques for multicolor integration. Visible emission at red, green, and blue wavelengths from GaN doped with Eu, Er, and Tm has led to the development of flat-panel display (FPD) devices. The brightness characteristics of thick dielectric EL (TDEL) display devices are reviewed as a function of bias, frequency, and time. High contrast TDEL devices using a black dielectric are presented. The fabrication and operation of FPD prototypes are described. Infrared emission at 1.5 Μm from GaN:Er ELDs has been applied to optical telecommunications devices. The fabrication of GaN channel waveguides by inductively coupled plasma etching is also reviewed, along with waveguide optical characterization.