0-1 GHz waveguide 10.6 mu m GaAs electrooptic modulator

摘要

A GaAs electrooptic modulator for use in 10.6- mu m laser frequency shifting applications is described. High-beam-quality output signals with a frequency tunability of 0.1-1.0 GHz were demonstrated. Thick epitaxial GaAs-AlGaAs waveguide structures were successfully fabricated into single-mode channel waveguides with excellent optical and electrooptic properties. A lumped-element modulator, with electrical and electrooptic characteristics in good agreement with theory, was operated at RF drive power levels up to the reverse breakdown voltage limit. The insertion loss of the modulator was quite high, due to absorption losses in the epitaxial material.