Advanced physical model for the optimisation of the width of a resistive Schottky barrier field plate

摘要

An advanced physical model based on a solution of Laplace's equation for a set of prescribed boundary conditions is developed, which describes the potential distribution across a resistive Schottky-barrier field plate (RESP). The model serves to ascertain an optimised RESP width, for an optimised RESP sheet resistance, for any potential bias. Optimising the width of the RESP for an optimised sheet resistance will enhance the reverse breakdown voltage handling capability of a Schottky-barrier diode whose periphery is terminated by such a structure. Using an optimised RESP structure will reduce the material costs and improve the high-speed operation of diodes which are edge-terminated in this manner.