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Automatic Split Post Dielectric Set-up for Measurements of Substrates and Thin Conducting and Ferroelectric Films

机译:自动分离后介电装置,用于测量基板,薄导电膜和铁电膜

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We have developed an inexpensive computer controlled microwave oscillator system that enables quick and automatic measurements of the complex permittivity with a specific split post dielectric resonator (SPDR). It is based on a phase-locked loop Microwave Voltage Controlled Oscillator intended for the Q-factor and the resonance frequency measurements of SPDR. Multipoint resonance curve fitting procedure allows accurate Q-factor determination. The only external information that is necessary for the complex permittivity determination of a dielectric substrate or a ferroelectric film is the thickness of the sample under test. We compare the complex permittivity measurement results on few dielectric samples employing Vector Network Analyser and our measurements set-up. We also present measurement results of the sheet resistance and resistivity of epitaxial GaN films deposited on sapphire substrates.View full textDownload full textRelated var addthis_config = { ui_cobrand: "Taylor & Francis Online", services_compact: "citeulike,netvibes,twitter,technorati,delicious,linkedin,facebook,stumbleupon,digg,google,more", pubid: "ra-4dff56cd6bb1830b" }; var addthis_config = {"data_track_addressbar":true,"ui_click":true}; Add to shortlist Link Permalink http://dx.doi.org/10.1080/00150193.2012.732779
机译:我们已经开发了一种廉价的计算机控制的微波振荡器系统,该系统可以使用特定的分立柱式介电共振器(SPDR)快速自动测量复介电常数。它基于锁相环微波压控振荡器,旨在用于SPDR的Q因子和谐振频率测量。多点共振曲线拟合程序可精确确定Q因子。确定介电基材或铁电薄膜的复介电常数所需的唯一外部信息是被测样品的厚度。我们使用Vector Network Analyzer和我们的测量设置比较了几种介电样品的复介电常数测量结果。我们还提供了沉积在蓝宝石衬底上的外延GaN薄膜的薄层电阻和电阻率的测量结果。查看全文下载全文相关的var addthis_config = {ui_cobrand:“ Taylor&Francis Online”,services_compact:“ citeulike,netvibes,twitter,technorati,delicious ,linkedin,facebook,stumbleupon,digg,google,更多”,发布号:“ ra-4dff56cd6bb1830b”}; var addthis_config = {“ data_track_addressbar”:true,“ ui_click”:true};添加到候选列表链接永久链接http://dx.doi.org/10.1080/00150193.2012.732779

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