On-site generated fluorine: Effective, safe, and reliable source of fluorine for electronics for over 15 years

摘要

On-site generated fluorine (F_2) is a safe and reliable alternative to greenhouse gases for chemical vapor deposition (CVD) chamber cleaning and is currently used in the commercial production of semiconductors and LCD screens in multiple sites in Asia and Europe. In the first of a two-part series, we describe the on-demand production of high-purity fluorine as demonstrated by Linde's installed base of more than 30 generators over the last 15 years. Production capacities ranging from 1 to 100+ tons / year have displaced high-pressure fluorine cylinder and bulk nitrogen trifluoride (NFg) supplies. Certification by leading safety and engineering authorities document the design details required to effectively deliver fluorine reliably and safely without incident. In Part 2, we will describe the fundamental physical properties of fluorine, which are the basis for significant process and cost of ownership improvements and which eliminate the need for greenhouse gases in chamber cleaning.