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Buffer design and insertion for global interconnections in 0.1 μm technology

机译:用于0.1μm技术中全局互连的缓冲器设计和插入

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This paper examines high-speed interconnection design in 0.1 μm technology from a simulation and modelling perspective. It is shown that using Cu metallisation in combination with a low-e dielectric can reduce the minimum delay considerably, as compared to using Al metallisation with SiO_2 as the inter-metal dielectric. Consequently, the use of Cu and a low-E dielectric leads to substantial saving of the surface area for buffers that are necessary to incorporate in order to maintain the improved performance when scaling down the device dimensions. As regard to buffer design and insertion, it is a good choice to allow the size of the cascaded inverters in each buffer to increase successively, and simultaneously to Permit the size-ratio of two consecutive inverters to increase along the signal propagation direction in order to minimise power consumption and delay. Furthermore, in order to save the precious Si surface area, it is preferable not to drive an interconnection line at a speed unnecessarily higher than the specified speed. Therefore, in parallel with the search for better conductors and insulators as well as improved interconnection technologies, there is an urgent need to address the interconnection issue from the circuit design perspective.
机译:本文从仿真和建模角度研究了0.1μm技术中的高速互连设计。结果表明,与使用SiO_2作为金属间电介质的Al金属化工艺相比,将Cu金属化工艺与低e电介质结合使用可以显着降低最小延迟。因此,使用Cu和低E介电质可大大节省缓冲器的表面积,为减小器件尺寸而必须结合使用该缓冲器以保持改进的性能。关于缓冲器的设计和插入,一个很好的选择是允许每个缓冲器中级联反相器的大小连续增大,同时允许两个连续反相器的大小比沿信号传播方向增大,以便最小化功耗和延迟。此外,为了节省宝贵的Si表面积,优选不要以不必要地高于指定速度的速度驱动互连线。因此,在寻求更好的导体和绝缘体以及改进的互连技术的同时,迫切需要从电路设计的角度解决互连问题。

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