Advantages of Capacitive Ceramic Pressure Sensors in Vacuum Technology

摘要

The differences to piezoresistive sensors start with the diaphragm. With their thickness of 50 urn, steel diaphragms are very sensitive to mechanical forces. Ceramic diaphragms have at least ten times the thickness and more, depending on the measuring range. This makes them much more robust against mechanical influences. In addition, ceramic has more favourable elastic properties than steel.