Investigation of fabrication conditions for VO_2 thin films by MOD using carbon thermal reduction

摘要

Vanadium dioxide (VO_2) thin films were fabricated by metal-organic decomposition (MOD). To utilize a carbon thermal reduction for obtaining a VO_2 composition, the precursor films were fabricated at the temperature Tp from 300°C to 380°C in a N_2 atmosphere. From the measurement results of XRD, diffraction peaks indicating VO_2 phase were observed with a wide range of firing temperatures from Tf = 560°C to 620°C. Furthermore, the peaks indicating VO_2 phase were also observed with a wide range of firing time from t_f=15-45 min. Regarding the surface morphology of the films, the nanoparticles of 100-200 nm were densely packed although small spaces existed between the particles. The R-T characteristics of the films indicated the phase transition with a rapid resistance change of about three orders of magnitude and hysteresis loop. From these experimental results, it was found that wide windows of firing conditions for fabricating VO_2 thin film can be obtained in the MOD process using the carbon thermal reduction.