FABRICATION METHOD FOR THIN FILM SENSOR, THIN FILM SENSOR AND THIN FILM SENSOR MODULE

摘要

PROBLEM TO BE SOLVED: To provide a method for fabricating a thin film sensor in which variation of electric characteristics is suppressed among products by achieving a strong orientation of crystal not through a step which is disadvantageous in cost such as a heat treatment.;SOLUTION: Fabrication method for the thin film sensor comprises an insulating substrate and a resistor consisting of a metal laminated on the insulating substrate. The fabrication method is characterized that a step forming the resistor by sputtering the metal while applying a negative DC voltage to the insulating substrate.;COPYRIGHT: (C)2008,JPO&INPIT