ALD poised for mainstream

摘要

In an ironic twist of corporate fates, ASML's move into ALD will put it into competition with one of its corporate progenitors. ASML formed in 1984 as a joint venture between Royal Philips Electronics and ASM International. ASM divested in 1988, and ASML became a publicly traded company in 1993 following Philips' divestiture. ASM has an ALD technology called atomic layer CVD or ALCVD. ASM and Genus Inc., incidentally, are involved in ongoing ALD patent litigation.