High Sensitivity Flexible Capacitive Pressure Sensor Using Polydimethylsiloxane Elastomer Dielectric Layer Micro-Structured by 3-D Printed Mold

摘要

3-D printing is used to fabricate mold for micro-structuring the polydimethylsiloxane (PDMS) elastomeric dielectric layer in capacitive flexible pressure sensors. It is shown that, despite of the limited resolution of the used commercial 3-D printer for producing the mold, the fabricated sensor with the micro-structured PDMS layers can achieve sensitivity higher than previous work using micro-fabricated silicon wafer molds. The devices also present very low detection limit, fast response/recovery speed, excellent durability and good tolerance to variations of ambient temperature and humidity, which enables to reliably monitor weak human physiological signals in real time. As an application example, the flexible pressure sensor is integrated in a wearable system to monitor wrist pulse.